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AZ, Single Stage Regulator, High Flow

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Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy®internals for corrosion resistance, and a tube stub weld fitting connection.

Manufacturer: SMC
Made in: Genuine

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AZ, Single Stage Regulator, High Flow

Product Advantages:

For UHP gas delivery
Flow capacity to 1000 slpm
Body material: 316L SS
Inlet pressure: max. 300 psig (2.1 MPa)

Specifications:

SeriesApplicationBody materialConnectionConnection size (inch)
Single stageDistribution (Point of use)316L SSFace seal

Tube stub

1/4, 3/8, 1/2
Source (Cylinder)
Sub-atmospheric (Absolute)
FeaturesFor UHP gas delivery in semiconductor and other clean industries

Body material: 316L SS secondary remelt or 316L SS

Wetted parts: Electropolish

Metal to metal seal to atmosphere

Model: 

AZ1200/ AZ1300/ AZ1400T/ AZ1000/ AZ1100/ AZ1500/ AZ9200

Product details at: Catalog AZ